WAFER IPA SPRAY BAR introduction & features

发布于2019-04-16 15:23    文章来源：未知

Current SPRAY BAR(AMAT manufacturing)
DUAL SPRAY BAR (TIANDA manufacturing)
DUAL SPRAY BAR features
    1) WAFER side  HOLEs Type modification , increase number of holes :
        One line Holes ( 169ea) → Two lines Holes (336 ea)
    2) IPA OUT side  Type modification : blocked via END CAP → Through via MICOR ELBOW FITTING
        To resolve problem of pressure distribution
 

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WAFER IPA SPRAY BAR introduction & features 2019-04-16